JPH0214364U - - Google Patents
Info
- Publication number
- JPH0214364U JPH0214364U JP9053588U JP9053588U JPH0214364U JP H0214364 U JPH0214364 U JP H0214364U JP 9053588 U JP9053588 U JP 9053588U JP 9053588 U JP9053588 U JP 9053588U JP H0214364 U JPH0214364 U JP H0214364U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- ion beam
- magnetic field
- beam apparatus
- sample stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims 2
- 239000000696 magnetic material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9053588U JPH0214364U (en]) | 1988-07-07 | 1988-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9053588U JPH0214364U (en]) | 1988-07-07 | 1988-07-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0214364U true JPH0214364U (en]) | 1990-01-29 |
Family
ID=31315051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9053588U Pending JPH0214364U (en]) | 1988-07-07 | 1988-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0214364U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4974273U (en]) * | 1972-10-12 | 1974-06-27 |
-
1988
- 1988-07-07 JP JP9053588U patent/JPH0214364U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4974273U (en]) * | 1972-10-12 | 1974-06-27 |